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Synonyms were used for: FEINMECHANIK
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Near-field scanning optical microscopy: electromagnetic coupling between the aperture tip and the sample [3276-15]

Gu, B.-Y. / Li, Z.-Y. / Yang, G.-Z. et al. | British Library Conference Proceedings | 1998

Keywords: micromechanics

Nonsilicon micromachining for MOEMS elements [3276-28]

Chen, Y.-X. / Zhao, X.-L. / Wang, Z.-G. et al. | British Library Conference Proceedings | 1998

Keywords: micromechanics

Microlens arrays formed by melting photoresist and ion beam milling [3276-27]

Yi, X.-J. / Zhang, X.-Y. / Li, Y. et al. | British Library Conference Proceedings | 1998

Keywords: micromechanics

Piezoelectrical elements for micro-optical applications (Invited Paper) [3276-22]

Goetz, B. / Martin, T. / Buecker, P. et al. | British Library Conference Proceedings | 1998

Keywords: micromechanics

MOEMS: a new European competence center-core competencies, additional technologies, and industrial objectives (Invited Paper) [3276-17]

Clerc, J. F. / Mottier, P. L. / SPIE | British Library Conference Proceedings | 1998

Keywords: micromechanics

Fiber optic MEMS pressure sensors based on evanescent field interaction [3276-31]

Tabib-Azar, M. / Sutapun, B. / Glawe, D. et al. | British Library Conference Proceedings | 1998

Keywords: micromechanics

MEMS-based diffractive optical-beam-steering technology [3276-07]

Winick, D. A. / Duewer, B. / Chaudhury, S. et al. | British Library Conference Proceedings | 1998

Keywords: micromechanics

Design and fabrication of optical MEMS using a four-level planarized surface-micromachined polycrystalline silicon process [3276-04]

Michalicek, M. A. / Comtois, J. H. / Schriner, H. K. et al. | British Library Conference Proceedings | 1998

Keywords: micromechanics

Mechanical-optical analysis of InP-based Bragg membranes for selective tunable WDM receivers [3276-18]

Riemenschneider, R. / Peerlings, J. / Pfeiffer, J. et al. | British Library Conference Proceedings | 1998

Keywords: micromechanics

System integration of micro-optical systems for beam steering and modulation applications [3276-08]

Gloeckner, S. / Dannberg, P. / Goering, R. et al. | British Library Conference Proceedings | 1998

Keywords: micromechanics

MOEM scan engine for bar code reading and factory automation (Invited Paper) [3276-06]

Motamedi, M. E. / Park, S. / Melendes, R. et al. | British Library Conference Proceedings | 1998

Keywords: micromechanics

Polymer waveguides for telecom, datacom, and sensor applications (Invited Paper) [3276-01]

Paatzsch, T. / Smaglinski, I. / Bauer, H.-D. et al. | British Library Conference Proceedings | 1998

Keywords: micromechanics

Evanescent field sensing: cavity-coupled refractive index sensor (CRIS) [3276-21]

Lindvoid, L. R. / Lading, L. / SPIE | British Library Conference Proceedings | 1998

Keywords: micromechanics

Optimum design of GaAs waveguides intersecting modulator [3276-13]

Xu, Z. / Rizzi, M. / Castagnolo, B. et al. | British Library Conference Proceedings | 1998

Keywords: micromechanics

Optical measurement of LIGA milliengine performance [3276-02]

Dickey, F. M. / Holswade, S. C. / Christenson, T. R. et al. | British Library Conference Proceedings | 1998

Keywords: micromechanics

Fabrication of micro-optical surface profiles by using grayscale masks [3276-29]

Kley, E.-B. / Thoma, F. / Zeitner, U. D. et al. | British Library Conference Proceedings | 1998

Keywords: micromechanics

In-package active fiber optic micro-aligner [3276-20]

Haake, J. M. / Wood, R. L. / Dhuler, V. R. et al. | British Library Conference Proceedings | 1998

Keywords: micromechanics

MEMS-based microgratings: preliminary results of novel configurations [3276-19]

Castracane, J. / Gutin, M. / SPIE | British Library Conference Proceedings | 1998

Keywords: micromechanics

Hybridization, assembling, and testing of miniaturized optoelectronic modules for sensors and microsystems [3276-05]

Kopola, H. K. / Karioja, P. / Rusanen, O. et al. | British Library Conference Proceedings | 1998

Keywords: micromechanics

Novel highly scalable and very high torque micromotor for MEMS and MOEMS applications using the mechanical rectification of oscillatory motion [3276-30]

Tabib-Azar, M. / Sutapun, B. / Motamedi, M. E. et al. | British Library Conference Proceedings | 1998

Keywords: micromechanics

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