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    Design and fabrication of optical MEMS using a four-level planarized surface-micromachined polycrystalline silicon process [3276-04]

    Design and fabrication of optical MEMS using a four-level planarized surface-micromachined polycrystalline silicon process [3276-04]


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    Title :

    Design and fabrication of optical MEMS using a four-level planarized surface-micromachined polycrystalline silicon process [3276-04]

    Contributors:
    Michalicek, M. A. (author) / Comtois, J. H. (author) / Schriner, H. K. (author) / Motamedi, M. E. / Goring, R. / SPIE
    Conference:

    Conference; 3rd, Miniaturized systems with micro-optics and micromechanics ; 1998 ; San Jose; CA

    Published in:

    Miniaturized systems with micro-optics and micromechanics ; 48-55

    PROCEEDINGS- SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING ; 3276

    Publication date :

    1998-01-01

    Size :

    8 pages

    ISBN :

    0819427152

    ISSN :

    0277-786X

    Type of media :

    Conference paper

    Type of material :

    Print

    Language :

    English

    Keywords :

    micro-optics , micromechanics , SPIE , miniaturized systems

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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