Title :

Microlens arrays formed by melting photoresist and ion beam milling [3276-27]

Contributors:

Yi, X.-J. (author) / Zhang, X.-Y. (author) / Li, Y. (author) / Zhao, X.-R. (author) / Motamedi, M. E. / Goring, R. / SPIE

Conference:

Conference; 3rd, Miniaturized systems with micro-optics and micromechanics ; 1998 ; San Jose; CA

Miniaturized systems with micro-optics and micromechanics ; 249-253

PROCEEDINGS- SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING ; 3276

Publication date :

1998-01-01

Size :

5 pages

ISBN :

0819427152

ISSN :

0277-786X

Type of media :

Conference paper

Type of material :

Print

Language :

English

Keywords :

micro-optics , micromechanics , SPIE , miniaturized systems

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