Defect detection in patterned wafers using anisotropic kernels

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Zontak, M. / Cohen, I.

Title :

Contributors:

Zontak, M. (author) / Cohen, I. (author)

Published in:

MACHINE VISION AND APPLICATIONS ; 21 , 2 ; 129-141

Publication date :

2010-01-01

Size :

13 pages

ISSN :

0932-8092

Type of media :

Article (Journal)

Type of material :

Language :

English

Classification :

DDC:

006.42

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