Design and fabrication of optoelectronic multichip module prototypes using MEMS fabrication techniques [3008-05]

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Design and fabrication of optoelectronic multichip module prototypes using MEMS fabrication techniques [3008-05]

Koh, S. / Sadler, D. J. / Oh, K. / Roenker, K. P. / SPIE

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Title :

Design and fabrication of optoelectronic multichip module prototypes using MEMS fabrication techniques [3008-05]

Contributors:

Koh, S. (author) / Sadler, D. J. (author) / Oh, K. (author) / Roenker, K. P. (author) / Motamedi, M. E. / Hornbeck, L. / Pister, K. S. J. / SPIE

Conference:

Conference, Miniaturized systems with micro-optics and micromechanics II ; 1997 ; San Jose; CA

Published in:

Miniaturized systems with micro-optics and micromechanics II ; 3008 ; 43-51

PROCEEDINGS- SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING ; 3008

Publication date :

1997-01-01

Size :

9 pages

ISBN :

0819424196

ISSN :

0277-786X

Type of media :

Conference paper

Type of material :

Language :

English

Keywords :

micro-optics , micromechanics , SPIE , miniaturized systems

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Staggs, J. / Smith, J. / IEEE et al. | British Library Conference Proceedings | 1997

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