Title :

Micro-optic fabrication using one-level gray-tone lithography [3008-32]

Contributors:

Reimer, K. (author) / Quenzer, H.-J. (author) / Juerss, M. (author) / Wagner, B. (author) / Motamedi, M. E. / Hornbeck, L. / Pister, K. S. J. / SPIE

Conference:

Conference, Miniaturized systems with micro-optics and micromechanics II ; 1997 ; San Jose; CA

Miniaturized systems with micro-optics and micromechanics II ; 3008 ; 279-288

PROCEEDINGS- SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING ; 3008

Publication date :

1997-01-01

Size :

10 pages

ISBN :

0819424196

ISSN :

0277-786X

Type of media :

Conference paper

Type of material :

Print

Language :

English

Keywords :

micro-optics , micromechanics , SPIE , miniaturized systems

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