Synonyms were used for: FEINMECHANIK
Search without synonyms: keywords:(FEINMECHANIK)

1–4 of 4 hits
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    Design and fabrication of optical MEMS using a four-level planarized surface-micromachined polycrystalline silicon process [3276-04]

    Michalicek, M. A. / Comtois, J. H. / Schriner, H. K. et al. | British Library Conference Proceedings | 1998
    Keywords: micromechanics

    Designs to improve polysilicon micromirror surface topology [3008-11]

    Burns, D. M. / Bright, V. M. / SPIE | British Library Conference Proceedings | 1997
    Keywords: micromechanics

    Realizing micro-opto-electro-mechanical devices through a commercial surface-micromachining process (Invited Paper) [2687-05]

    Bright, V. M. / Comtois, J. H. / Sene, D. E. et al. | British Library Conference Proceedings | 1996
    Keywords: micromechanics

    Microactuated mirrors for beam steering [3008-10]

    Gustafson, S. C. / Little, G. R. / Burns, D. M. et al. | British Library Conference Proceedings | 1997
    Keywords: micromechanics