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FEINMECHANIK
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Optical characterization methods of InP-based micro-opto-electro-mechanical systems [3008-29]
Laser aperture integrated with position-sensing detectors [3008-03]
Microjet printing of anamorphic microlens arrays [2687-11]
Magnetically actuated MEMS scanning mirror [2687-06]
Recent achievements on MOEM systems at Micromachine Center (MMC) (Invited Paper) [2687-01]
Monolithically integrated refractive microlens standing perpendicular to the substrate [2687-21]
FPAs and thin film binary optic microlens integration (Invited Paper) [2687-09]
Aspherization of cylindrical lenses by laser irradiation [2687-20]