Title :

Magnetically actuated MEMS scanning mirror [2687-06]

Contributors:

Miller, R. A. (author) / Burr, G. W. (author) / Tai, Y.-C. (author) / Psaltis, D. (author) / Motamedi, M. E. / SPIE

Conference:

Conference, Miniaturized systems with micro-optics and micromechanics ; 1996 ; San Jose; CA

Miniaturized systems with micro-optics and micromechanics ; 2687 ; 47-52

PROCEEDINGS- SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING ; 2687

Publication date :

1996-01-01

Size :

6 pages

ISBN :

0819420611

ISSN :

0361-0748

Type of media :

Conference paper

Type of material :

Print

Language :

English

Keywords :

micro-optics , micromechanics , SPIE , miniaturized systems

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