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Multicrystalline silicon
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Development of high‐performance multicrystalline silicon for photovoltaic industry
Kleine Größe - großer Nutzen. Dreiachsige "Low-g"-Beschleunigungssensoren
Motorola and MEMMS: the way up to a surface micromachined accelerometer
Temperature dependence and drift of a thermal accelerometer (for automobile use)
Sensor portfolio for automotive applications based on surface micro-machining with thick polysilicon
Schädigung von Optronik mit kurzen und ultrakurzen Laserpulsen
The effect of dissociated oxygen on the oxidation of Si, polycrystalline SiC and LPCVD Si3N4
Low dimensional structures and devices: micro- and nano-technology
Silizium zur Wasserstofferzeugung als Langzeitspeicher für regenerative Energie
Technology news. Micromechanical actuators control aircraft wing
Aerodynamic control of a delta-wing using MEMS sensors and actuators