Microfabricated chemical sensors for safety and emission control applications
Microfabricated chemical sensors for safety and emission control applications
- New search for: Hunter, G.W.
- New search for: Neudeck, P.G.
- New search for: Chen, Liang-Yu
- New search for: Knight, D.
- New search for: Liu, C.C.
- New search for: Wu, Q.H.
- New search for: Hunter, G.W.
- New search for: Neudeck, P.G.
- New search for: Chen, Liang-Yu
- New search for: Knight, D.
- New search for: Liu, C.C.
- New search for: Wu, Q.H.
Chemical sensor technology is being developed for leak detection, emission monitoring, and fire safety applications. The development of these sensors is based on progress in two types of technology: 1) micromachining and microfabrication (MEMS-based) technology to fabricate miniaturized sensors; 2) the development of high temperature semiconductors, especially silicon carbide. Using these technologies, sensors to measure hydrogen, hydrocarbons, nitrogen oxides, carbon monoxide, oxygen, and carbon dioxide are being developed. A description is given of each sensor type and its present stage of development. It is concluded that microfabricated sensor technology has significant potential for use in a range of aerospace applications.
Document information
Microfabricated chemical sensors for safety and emission control applications
1998
8 Seiten, 14 Quellen
Conference paper
English
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