Side Airbag Sensor in Silicon Micromachining

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Side Airbag Sensor in Silicon Micromachining

Maihöfer, B. / Ullmann, D. / Bischopink, G. / Marek, J. / Seibold, J. / Schöfthaler, M. / Schellin, R.

For side airbag systems it is necessary to measure the acceleration within a time of less than 3 ms in order to inflate the side airbag in time. A new generation of side airbag sensors that uses a linear accelerometer is presented. The evaluation circuit includes amplification, temperature coefficient compensation, two wire unidirectional current interface, and a zero-offset compensation. The sensing element for the measurement of acceleration is a surface micromachined accelerometer. In order to minimise the production costs the surface micromachined sensor element and the corresponding evaluation ASIC are packaged into a standard PLCC28 housing. For the entire function only few external components are necessary. During the power-on cycle an internal selftest is carried out and the result is transmitted to the airbag control unit. Most important results of the characterisation are presented.

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Document information

Title :

Side Airbag Sensor in Silicon Micromachining

Additional title:

Sae Technical Papers

Contributors:

Maihöfer, B. (author) / Ullmann, D. (author) / Bischopink, G. (author) / Marek, J. (author) / Seibold, J. (author) / Schöfthaler, M. (author) / Schellin, R. (author)

Conference:

International Congress & Exposition ; 1999

Published in:

Sae Technical Paper Series

Publication date :

1999-03-01

ISSN :

2688-3627 , 0148-7191

DOI :

https://doi.org/10.4271/1999-01-0757

Type of media :

Conference paper