Micro-Cooler for Chip-Level Temperature Control
Micro-Cooler for Chip-Level Temperature Control
- New search for: Kirshberg, Jeffrey
- New search for: Yerkes, Kirk L.
- New search for: Kirshberg, Jeffrey
- New search for: Yerkes, Kirk L.
The objective of this paper is to design and fabricate a micro-cooler to provide integral cooling to electronics or Microelectromechanical Systems (MEMS) type components utilizing current MEMS technologies. A three-port capillary pumped loop (CPL) was analyzed and fabricated from silicon and quartz for this purpose. An analytical study of the device is presented in support of this design. This proves the feasibility of such a device, and thus the rationale for continuing its development.
Document information
Micro-Cooler for Chip-Level Temperature Control
Sae Technical Papers
Aerospace Power Systems Conference ; 1999
1999-04-06
Conference paper
English
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