Study of Metal Etching Using Ozone Water

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Study of Metal Etching Using Ozone Water

Hatsuki, Ryuji

We have proposed and experimentally demonstrated an environmental friendly, simple, and inexpensive etching method for metal using ozone water. We experimentally measured the dependencies of ozone water etching on the temperature and ozone concentration for several metals (Cr, Ni, Al, Au, and Ti), and also evaluated the surface roughness of the etched surface. The etching mechanism using ozone water can be explained by the activation energy obtained using an Arrhenius plot and a pH‐potential diagram. As a result, it was found that the etching rate was proportional to the dissolved ozone concentration and temperature, and that an atomically flat surface was obtained after etching with ozone water, although it was also found that the etching rate was very low at a few tens of nanometers per hour. It is therefore difficult to use this method for performing conventional macro‐ and microscale etching, whereas the rate is sufficiently high to use it for nanoscale (i.e., a few tens of nanometers) metal etching in nanoscience and nanotechnology.

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Document information

Title :

Study of Metal Etching Using Ozone Water

Contributors:

Hatsuki, Ryuji (author) / Yamamoto, Takatoki

Published in:

Electrical engineering in Japan ; 193 , 1

Publication date :

2015

ISSN :

0424-7760

DOI :

https://doi.org/10.1002/eej.22532

Type of media :

Article (Journal)

Type of material :

Language :

English

Keywords :

Japan , Zeitschrift , Elektrotechnik

Classification :

BKL:		53.00 / 53.33 / 52.53 Kraftwerkstechnik / 53.31 / 52.53 / 53.33 Elektrische Maschinen und Antriebe / 53.00 Elektrotechnik: Allgemeines / 53.31 Elektrische Energieübertragung
Local classification TIB:		770/5600/8000