Electrically conductive diffusion barriers of TaSiN prevent diffusion of metal from overlying metal contacts into underlying silicon during processing at high temperature, improving performance during subsequent use in low-intensity light at low temperature.


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    Title :

    Diffusion-Barrier Contacts For Solar Cells


    Contributors:

    Published in:

    Publication date :

    1996-03-01



    Type of media :

    Miscellaneous


    Type of material :

    No indication


    Language :

    English





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