Valve modification provides two operating modes fully open and small, precise leak. Copper insert with radially oriented holes allows small, controllable, precise effusion rate when valve closed or nearly unobstructed flow when valve open. Numerous applications in surface physics, vacuum physics, materials science, gas kinetics, thin films, and other areas of research requiring measured flows of gas into or out of system.


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    Title :

    Precise-Conductance Valve Insert


    Contributors:
    Outlaw, R. A. (author) / Hoyt, R. F. (author)

    Published in:

    Publication date :

    1986-06-01



    Type of media :

    Miscellaneous


    Type of material :

    No indication


    Language :

    English


    Keywords :


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