Silicon plate penetration with a high energy laser pulse

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Silicon plate penetration with a high energy laser pulse

Nishimura, A. / Usami, T. / Deki, K. / Shimobeppu, Y. / Hayasaka, N. / Arisawa, T.

Laser processing on a silicon plate was observed. A free running flashlamp pumped Ti:sapphire laser was used. A pair of PIN detectors was useful for the detection of penetration. The photographs of keyhole were taken by laser microscopy.

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Title :

Silicon plate penetration with a high energy laser pulse

Contributors:

Nishimura, A. (author) / Usami, T. (author) / Deki, K. (author) / Shimobeppu, Y. (author) / Hayasaka, N. (author) / Arisawa, T. (author)

Published in:

Technical Digest. CLEO/Pacific Rim 2001. 4th Pacific Rim Conference on Lasers and Electro-Optics (Cat. No.01TH8557) ; 2 ; II

Publication date :

2001-01-01

Size :

204757 byte

ISBN :

0-7803-6738-3

DOI :

https://doi.org/10.1109/CLEOPR.2001.970941

Type of media :

Conference paper

Type of material :

Electronic Resource

Language :

English

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