TRANSPORT CONTROL APPARATUS AND TRANSPORT CONTROL SYSTEM INCLUDING THE SAME

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TRANSPORT CONTROL APPARATUS AND TRANSPORT CONTROL SYSTEM INCLUDING THE SAME

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YU SU-JONG

There is provided a transport control system assigning multiple jobs to an overhead hoist transport (OHT) based on the availability of linkage transporting and the likelihood of transport congestion.The transport control system includes: a plurality of transports, each of the plurality of transports transporting a carrier with a wafer loaded thereon; and a transport control apparatus controllingthe plurality of transports and determining one of the plurality of transports as a target transport to which multiple jobs are to be assigned. The transport control apparatus determines one of the plurality of transports as the target transport based on a first element, which is the availability of linkage transporting, and a second element, which is the likelihood of transport congestion.

提供了考虑是否能够进行连续运送、运送停滞等来将作业多重分配给OHT的运送机控制系统。运送机控制系统包括多个运送机和运送机控制装置，其中：多个运送机运送收纳有晶片的载体；运送机控制装置控制多个运送机，并且在多个运送机中确定待执行多个作业的一个运送机，其中，运送机控制装置利用表示是否能够进行连续运送的第一因素和表示在运送中是否存在运送停滞的第二因素中的至少一个因素来确定一个运送机。