Vanadium dioxide intelligent thermal control device with longhorn beetle-imitating multistage structure and preparation method thereof

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Vanadium dioxide intelligent thermal control device with longhorn beetle-imitating multistage structure and preparation method thereof

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ZHAO JIUPENG / GU JINXIN / DOU SHULIANG / LI YAO / REN FEIFEI / WEI HANG / LI LONG

The invention discloses a vanadium dioxide (VO2) intelligent thermal control device with a longhorn beetle-imitating multistage structure and a preparation method thereof, and belongs to the technicalfield of intelligent thermal control coating layers. The problems that an existing intelligent thermal control device based on VO2 is small in emissivity change and high in solar absorption ratio aresolved. The VO2 intelligent thermal control device with the longhorn beetle-imitating multistage structure is composed of a semiconductor substrate layer, an infrared high-reflection metal layer, anHfO2 dielectric layer, a VO2 layer and a protective layer in sequence from bottom to top. The preparation method comprises the steps: 1, preparing the infrared high-reflection metal layer; 2, preparing a dielectric film; 3, preparing a VO2 film; 4, processing a microstructure; and 5, depositing a protective layer. The invention discloses the vanadium dioxide intelligent thermal control device withthe longhorn beetle-imitating multistage structure and the preparation thereof.

一种仿天牛多级结构的二氧化钒智能热控器件及其制备方法，它属于智能热控涂层技术领域。本发明要解决现有基于VO的智能热控器件发射率变化小，太阳吸收比高的问题。仿天牛多级结构的二氧化钒智能热控器件自下而上依次由半导体基底层、红外高反射金属层、HfO介质层、VO层和保护层组成。制备方法：一、红外高反射金属层的制备；二、介质薄膜制备；三、VO薄膜制备；四、微结构加工；五、保护层沉积。本发明用于仿天牛多级结构的二氧化钒智能热控器件及其制备。