APPLICATION OF THE METHOD AND TOOLS FOR MONITORING THE ENERGY CONSUMPTION OF CLEAN ROOMS BASED ON THE USE OF THE SOFTWARE PACKAGE STATISTICA NEURAL NETWORKS

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APPLICATION OF THE METHOD AND TOOLS FOR MONITORING THE ENERGY CONSUMPTION OF CLEAN ROOMS BASED ON THE USE OF THE SOFTWARE PACKAGE STATISTICA NEURAL NETWORKS

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Yu. A. Lakhov / A. V. Fomina / V. M. Balashov

A system of monitoring of power consumption processes in power supply infrastructure of clean rooms at microelectronics manufacturing enterprise is proposed in the article. Classification of basic process operations performed in clean rooms has been completed. The key factors for monitoring of energy consumption processes of microelectronics manufacturing enterprises have been determined. A comparative analysis of various techniques for forecasting of power consumption by an enterprise specializing in microelectronics production has been performed. It is discovered that systems with neural networks provide the highest resistance against external and internal disturbing factors. A solution of the problem of forecasting of power consumption with the use of Statistica Neural Network software suite is proposed. The results of numerical modelling of predicted and actual values of power consumption by clean rooms of electric infrastructure at microelectronics manufacturing enterprise on the basis of the developed software algorithm are presented.

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Title :

APPLICATION OF THE METHOD AND TOOLS FOR MONITORING THE ENERGY CONSUMPTION OF CLEAN ROOMS BASED ON THE USE OF THE SOFTWARE PACKAGE STATISTICA NEURAL NETWORKS

Contributors:

Yu. A. Lakhov (author) / A. V. Fomina (author) / V. M. Balashov (author)

Published in:

Радиопромышленность, Vol 28, Iss 2, Pp 76-79 (2018)

Publication date :

2018

ISSN :

2413-9599 , 2541-870X

DOI :

https://doi.org/10.21778/2413-9599-2018-2-76-79

Type of media :

Article (Journal)