Measurement of the Surface Force in Micro Structures and Its Reduction
Measurement of the Surface Force in Micro Structures and Its Reduction
- New search for: Tsuchitani, S.
- New search for: Suzuki, S.
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- New search for: Miki, M.
- New search for: Tsuchitani, S.
- New search for: Suzuki, S.
- New search for: Shimada, S.
- New search for: Miki, M.
Document information
Measurement of the Surface Force in Micro Structures and Its Reduction
TRANSACTIONS- SOCIETY OF INSTRUMENT AND CONTROL ENGINEERS ; 30 , 2 ; 136
1994-01-01
136 pages
Article (Journal)
Unknown
| DDC: | 629.8 |
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