Growth of ZnO epitaxial films by metal organic chemical vapor deposition at various temperatures
5th, Pacific Rim conference on lasers and electro-optics; photonics lights innovation: from nano-structures and devices to systems and networks ; 2003 ; Taipei, Taiwan
2003-01-01
653 pages
Includes bibliographic references and author index
Conference paper
English
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HIGH EFFICIENCY EPITAXIAL CHEMICAL VAPOR DEPOSITION (CVD) REACTOR
European Patent Office | 2016
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