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    Title :

    Surface-Micromachined and High-Aspect Ratio Electrostatic Actuators for Aeronatutic and Space Applications: Design and Lifetime Considerations



    Conference:

    European symposium; 10th, Space mechanisms and tribology ; 2003 ; San Sebastian, Spain



    Publication date :

    2003-01-01


    Size :

    8 pages




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English





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