Title :

Modeling of a filamental discharge formation and development in ArF excimer laser [2989-19]

Contributors:

Akashi, H. (author) / Sakai, Y. (author) / Tagashira, H. (author) / Takahashi, N. (author) / Farrukh, U. O. / Basu, S. / SPIE

Conference:

Conference, Modeling and simulation of higher-power laser systems IV ; 1997 ; San Jose; CA

Modeling and simulation of higher-power laser systems IV ; 2989 ; 172-182

PROCEEDINGS- SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING ; 2989

Publication date :

1997-01-01

Size :

11 pages

ISBN :

0819424005

ISSN :

0277-786X

Type of media :

Conference paper

Type of material :

Print

Language :

English

Keywords :

higher-power laser systems , SPIE , laser systems

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