Optimization of 200-W excimer laser for TFT annealing [2992-05]

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Optimization of 200-W excimer laser for TFT annealing [2992-05]

Pfeufer, V. / Voss, F. / Becker-De Mos, B. / Stamm, U. / SPIE

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Title :

Optimization of 200-W excimer laser for TFT annealing [2992-05]

Contributors:

Pfeufer, V. (author) / Voss, F. (author) / Becker-De Mos, B. (author) / Stamm, U. (author) / Shields, H. / Dyer, P. E. / SPIE

Conference:

Meeting, Excimer lasers, optics, and applications ; 1997 ; San Jose; CA

Published in:

Excimer lasers, optics, and applications ; 2992 ; 35-44

PROCEEDINGS- SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING ; 2992

Publication date :

1997-01-01

Size :

10 pages

ISBN :

081942403X

ISSN :

0277-786X

Type of media :

Conference paper

Type of material :

Language :

English

Keywords :

excimer lasers , SPIE , optics

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