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Microelectromechanical systems
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An Assembly Method for Ball Lens Using Wafer Bonding
Dynamic Measurement of MEMS by Microscopic DESPI
Wavelength Selective Variable Reflection Filters Using Movable Guided Mode Resonance Gratings
Low-Voltage Bulk Micromirror Device Using Tense Thin Film Torsion Bar
Rotation Angle Sensor in Micromirror Device
Pitch-Variable Subwavelength Gratings Driven by Comb Actuators