1–6 of 6 hits
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    An Assembly Method for Ball Lens Using Wafer Bonding

    Nakai, F. / Sasaki, M. / Hane, K. et al. | British Library Conference Proceedings | 2004
    Keywords: Optical MEMS

    Dynamic Measurement of MEMS by Microscopic DESPI

    Motohashi, K. / Toyooka, S. / Kadono, H. et al. | British Library Conference Proceedings | 2004
    Keywords: Optical MEMS

    Wavelength Selective Variable Reflection Filters Using Movable Guided Mode Resonance Gratings

    Kanamori, Y. / Kitani, T. / Hane, K. et al. | British Library Conference Proceedings | 2004
    Keywords: Optical MEMS

    Low-Voltage Bulk Micromirror Device Using Tense Thin Film Torsion Bar

    Yuuki, S. / Sasaki, M. / Hane, K. et al. | British Library Conference Proceedings | 2004
    Keywords: Optical MEMS

    Rotation Angle Sensor in Micromirror Device

    Sasaki, M. / Haga, T. / Hane, K. et al. | British Library Conference Proceedings | 2004
    Keywords: Optical MEMS

    Pitch-Variable Subwavelength Gratings Driven by Comb Actuators

    Kobayashi, T. / Kanamori, Y. / Hane, K. et al. | British Library Conference Proceedings | 2004
    Keywords: Optical MEMS