Synonyms were used for:
Mems
•
Microelectromechanical systems
Search without synonyms:
keywords:(Mems(Microelectromechanical systems))
An Optical Lens Scanner with Electrostatic Comb Drive XY-Stage
A Vertical-Comb Torsion Mirror with Distributed Gaps for Suppressing In-Plane Instability
A Two-Mask Process for Self-Assembled Vertical Comb Drive Mirrors
Optically Assisted Electrostatic Actuation Mechanism