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    Accurate sizing of deposited PSL spheres from light scatter measurements [4449-19]

    Stover, J. C. / Scheer, C. A. / SPIE | British Library Conference Proceedings | 2001
    Contributors: Duparre, A.

    Advanced methods for surface and subsurface defect characterization of optical components [4099-34]

    Steinert, J. / Gliech, S. / Wuttig, A. et al. | British Library Conference Proceedings | 2000

    Advantages of a new subnanometer aspheric profiling technique with respect to the unique requirements of EUV lithography mirrors [4449-24]

    Glenn, P. E. / SPIE | British Library Conference Proceedings | 2001
    Contributors: Duparre, A.

    AFM tip calibration using nanometer-sized structures induced by ion beam sputtering [4449-28]

    Frost, F. / Hirsch, D. / Schindler, A. et al. | British Library Conference Proceedings | 2001
    Contributors: Duparre, A.

    Atomic Force Microscopy: AFM helps engineer low-scatter thin films

    Duparre, A. / Kaiser, N. | British Library Online Contents | 1998

    Automated high-accuracy measuring system for specular microreflectivity [4449-15]

    Grunwald, R. / Nerreter, S. / Tomm, J. W. et al. | British Library Conference Proceedings | 2001
    Contributors: Duparre, A.

    Characterization procedures for nanorough ultrahydrophobic surfaces with controlled optical matter [5188-30]

    Flemming, M. / Reihs, K. / Duparre, A. et al. | British Library Conference Proceedings | 2003

    Combined metrology including VUV spectroscopic ellipsometer and grazing x-ray reflectance for precise characterization of thin films and multilayers at 157 nm [4449-06]

    Boher, P. / Evrard, P. / Piel, J. P. et al. | British Library Conference Proceedings | 2001
    Contributors: Duparre, A.

    Diffractive solid immersion lenses: characterization and manufacturing [4449-29]

    Brunner, R. / Bischoff, J. / Rudolf, K. et al. | British Library Conference Proceedings | 2001
    Contributors: Duparre, A.

    DUV/VUV light scattering measurement of optical components for lithography applications [4099-10]

    Gliech, S. / Steinert, J. / Flemming, M. et al. | British Library Conference Proceedings | 2000

    Effects of particle shape on particle identification and scatter predictions [4449-18]

    Ivakhnenko, V. I. / Stover, J. C. / Scheer, C. A. et al. | British Library Conference Proceedings | 2001
    Contributors: Duparre, A.

    Feasibility and applicability of integrated metrology using spectroscopic ellipsometry in a cluster tool [4449-10]

    Boher, P. / Piel, J. P. / Stehle, J. L. et al. | British Library Conference Proceedings | 2001
    Contributors: Duparre, A.

    Funktionsrelevante Rauheitsanalyse durch kombinative Verfahren

    Duparre,A. / Fraunhofer Inst.f.Angewandte Optik u.Feinmechanik,IOF,Jena,DE | Automotive engineering | 2012

    How to measure sub-ppm optical homogeneity in fused silica: impact of temperature on accuracy and reproducibility [4449-14]

    Schoenfeld, D. / Kuehn, B. / Steinert, A. et al. | British Library Conference Proceedings | 2001
    Contributors: Duparre, A.

    Infrared spectroscopic ellipsometry for nondestructive characterization of free-carrier and crystal-structure properties of group-III-nitride semiconductor device heterostructures [4449-08]

    Schubert, M. / Kasic, A. / Figge, S. et al. | British Library Conference Proceedings | 2001
    Contributors: Duparre, A.

    Interferometric metrology of wafer nanotopography for advanced CMOS process integration (Invited Paper) [4449-21]

    Valley, J. F. / Koliopoulos, C. L. / Tang, S. et al. | British Library Conference Proceedings | 2001
    Contributors: Duparre, A.

    IR spectroscopic ellipsometry for industrial characterization of semiconductors [4449-09]

    Boher, P. / Bucchia, M. / Piel, J. P. et al. | British Library Conference Proceedings | 2001
    Contributors: Duparre, A.

    Measurement of absorptance of optical coatings for F~2 lithography [4449-02]

    Ouchi, C. / Hasegawa, M. / Matsumoto, A. et al. | British Library Conference Proceedings | 2001
    Contributors: Duparre, A.

    Measurement of steep aspheres: a step forward to nanometer accuracy [4449-25]

    Weingartner, I. / Schulz, M. / Thomsen-Schmidt, P. et al. | British Library Conference Proceedings | 2001
    Contributors: Duparre, A.

    Measurement of the elastic constants of nanometric films [4449-16]

    Beghi, M. G. / Bottani, C. E. / Bassi, A. L. et al. | British Library Conference Proceedings | 2001
    Contributors: Duparre, A.

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