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    Quasi-confocal extended field surface sensing [4449-23]

    Cohen-Sabban, J. / Gaillard-Groleas, J. / Crepin, J.-P. et al. | British Library Conference Proceedings | 2001
    Contributors: Duparre, A.

    Automated high-accuracy measuring system for specular microreflectivity [4449-15]

    Grunwald, R. / Nerreter, S. / Tomm, J. W. et al. | British Library Conference Proceedings | 2001
    Contributors: Duparre, A.

    Feasibility and applicability of integrated metrology using spectroscopic ellipsometry in a cluster tool [4449-10]

    Boher, P. / Piel, J. P. / Stehle, J. L. et al. | British Library Conference Proceedings | 2001
    Contributors: Duparre, A.

    Infrared spectroscopic ellipsometry for nondestructive characterization of free-carrier and crystal-structure properties of group-III-nitride semiconductor device heterostructures [4449-08]

    Schubert, M. / Kasic, A. / Figge, S. et al. | British Library Conference Proceedings | 2001
    Contributors: Duparre, A.

    Measurement of absorptance of optical coatings for F~2 lithography [4449-02]

    Ouchi, C. / Hasegawa, M. / Matsumoto, A. et al. | British Library Conference Proceedings | 2001
    Contributors: Duparre, A.

    Stitching interferometry of aspherical surfaces [4449-34]

    Hansel, T. / Nickel, A. / Schindler, A. et al. | British Library Conference Proceedings | 2001
    Contributors: Duparre, A.

    Rapid Confocal Sensor: a noncontact profilometer for fast 3D submicron inspection and metrology of large formats [4449-22]

    Vaughnn, D. / Watkins, C. / Anderson, D. et al. | British Library Conference Proceedings | 2001
    Contributors: Duparre, A.

    Interferometric metrology of wafer nanotopography for advanced CMOS process integration (Invited Paper) [4449-21]

    Valley, J. F. / Koliopoulos, C. L. / Tang, S. et al. | British Library Conference Proceedings | 2001
    Contributors: Duparre, A.

    Accurate sizing of deposited PSL spheres from light scatter measurements [4449-19]

    Stover, J. C. / Scheer, C. A. / SPIE | British Library Conference Proceedings | 2001
    Contributors: Duparre, A.

    Measuring small absorption losses of laser pulses in fused silica by a pump and probe technique [4449-03]

    Muhlig, C. / Kufert, S. / Bark-Zollmann, S. et al. | British Library Conference Proceedings | 2001
    Contributors: Duparre, A.

    Measurement of total integrated scatter of optical coatings for 157-nm lithography [4449-04]

    Saito, T. / Saito, J. / Nakamura, E. et al. | British Library Conference Proceedings | 2001
    Contributors: Duparre, A.

    How to measure sub-ppm optical homogeneity in fused silica: impact of temperature on accuracy and reproducibility [4449-14]

    Schoenfeld, D. / Kuehn, B. / Steinert, A. et al. | British Library Conference Proceedings | 2001
    Contributors: Duparre, A.

    Recommendations for the metrological calibration of SPMs: a survey on the European SPMet network project (Invited Paper) [4449-27]

    Rothe, H. / Wilkening, G. / Huser, D. et al. | British Library Conference Proceedings | 2001
    Contributors: Duparre, A.

    Standardization of the measurement of laser-induced damage threshold and material absorption [4449-12]

    Wood, R. M. / SPIE | British Library Conference Proceedings | 2001
    Contributors: Duparre, A.

    DUV/VUV light scattering measurement of optical components for lithography applications [4099-10]

    Gliech, S. / Steinert, J. / Flemming, M. et al. | British Library Conference Proceedings | 2000

    Advanced methods for surface and subsurface defect characterization of optical components [4099-34]

    Steinert, J. / Gliech, S. / Wuttig, A. et al. | British Library Conference Proceedings | 2000

    Microroughness analysis of thin film components for VUV applications [4099-13]

    Ferre-Borrull, J. / Duparre, A. / Steinert, J. et al. | British Library Conference Proceedings | 2000

    New procedure for the optical characterization of high-quality thin films [4099-16]

    Bosch, S. / Leinfellner, N. / Quesnel, E. et al. | British Library Conference Proceedings | 2000

    X-ray study of the roughness of surfaces and interfaces [4099-12]

    Kozhevnikov, I. V. / Asadchikov, V. E. / Bukreeva, I. N. et al. | British Library Conference Proceedings | 2000

    X-ray investigations of a near surface layer of metal samples [4099-33]

    Gilev, O. N. / Asadchikov, V. E. / Duparre, A. et al. | British Library Conference Proceedings | 2000

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