1–7 of 7 hits
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    Focusing ring lifting mechanism and device for improving etching uniformity of cavity

    Free access
    YE LINKE / SHEN JI / TANG JIEFENG et al. | European Patent Office | 2023

    Gas collection device based on radio frequency ionization

    Free access
    DING LIANG / ZHAO HUA / REN QIONGYING et al. | European Patent Office | 2020

    Lifting mechanism and semiconductor process equipment

    Free access
    WANG ZENGHUI / ZHENG YOUSHAN / FENG LYUCHEN | European Patent Office | 2022

    EFFICIENCY IMPROVEMENTS FOR A MAGNETIC FIELD PROPULSION DRIVE

    Free access
    MAY LUTZ | European Patent Office | 2021

    臭氧发生装置、空调装置及车辆

    Free access
    European Patent Office | 2023

    Substrate receiving region for processing chamber

    Free access
    MAY WALTER | European Patent Office | 2022