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FEINMECHANIK
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Actuation of polysilicon surface-micromachined mirrors [2687-07]
Analysis of optical beam steering using phased micromirror arrays [2687-08]
Application of micro- and nanotechnologies for the fabrication of optical devices [3276-100]
Aspherization of cylindrical lenses by laser irradiation [2687-20]
Assembling of micro-optical components [3008-27]
Automatic test equipment for the micromirror array [3276-10]
Complex microprism structures and their application to multichannel fiber optic switches [3276-16]
Deep-UV laser-based nano-patterning with holographic techniques [6459-14]
Design and fabrication issues in the development of monolithic micro-optical systems [2687-12]