1–3 of 3 hits
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    MEMS technology at NASA's Jet Propulsion Laboratory

    Yang, E.-H. / Wiberg, D. / White, V. et al. | NTRS | 2000
    Keywords: MEMS

    Development of ultra-high sensitivity nano-mechanical resonators for RF mechanical filter applications

    Son, K. / George, T. / Fathauer, R. W. et al. | NTRS | 2003
    Keywords: MEMS nano mechanical resonator

    MEMS development for space applications at NASA/JPL

    George, T. | NTRS | 2001
    Keywords: MEMS space applications micro-gyroscope micro propulsion LIGA