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FEINMECHANIK
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Usinage chimique de pieces en forme en alliage d'aluminium
Ultrahigh-density optical recording using a scanning near-field optical microscope [3276-26]
System integration of micro-optical systems for beam steering and modulation applications [3276-08]
Surface-micromachined tunable resonant cavity LED using wafer bonding [3008-04]
Strength of indium-phosphide-based microstructures [3008-28]
Silicon mirror arrays fabricated by using bulk and surface micromachining [3008-34]
Resonating large-angle and low-consumption micromachined optical scanner [3276-09]
Recent achievements on MOEM systems at Micromachine Center (MMC) (Invited Paper) [2687-01]