X-ray study of the roughness of surfaces and interfaces [4099-12]
X-ray study of surfaces and interfaces [4449-31]
VUV light-scattering measurements of substrates and thin film coatings [5188-14]
Microroughness analysis of thin film components for VUV applications [4099-13]
DUV/VUV light scattering measurement of optical components for lithography applications [4099-10]
Advanced methods for surface and subsurface defect characterization of optical components [4099-34]