Synonyms were used for:
Mems
•
Microelectromechanical systems
Search without synonyms:
keywords:(Mems(Microelectromechanical systems))
Pitch-Variable Subwavelength Gratings Driven by Comb Actuators
Dynamic Measurement of MEMS by Microscopic DESPI
Wavelength Selective Variable Reflection Filters Using Movable Guided Mode Resonance Gratings
Low-Voltage Bulk Micromirror Device Using Tense Thin Film Torsion Bar
Rotation Angle Sensor in Micromirror Device
An Assembly Method for Ball Lens Using Wafer Bonding