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Laserinterferometrie
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keywords:("Laserinterferometrie")
Flatness measurement by a UV moire technique [3478-54]
Precise measurement of nonoptical surfaces by an oblique incidence interferometer [3478-20]
Precise surface measurement by local sampling phase-shifting technique [2860-14]
Nonoptical surface measurement by oblique incidence interferometry [2860-34]