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    CANEUS2006-11038 Two Dimensional Scanning LIDAR for Planetary Explorer

    Mizuno, T. / Mita, M. / Takahara, T. et al. | British Library Conference Proceedings | 2006
    Keywords: Microelectromechanical systems

    A Vertical-Comb Torsion Mirror with Distributed Gaps for Suppressing In-Plane Instability

    Obi, H. / Yamanoi, T. / Fujita, H. et al. | British Library Conference Proceedings | 2004
    Keywords: Optical MEMS

    An Optical Lens Scanner with Electrostatic Comb Drive XY-Stage

    Takahashi, K. / Saruta, K. / Mita, M. et al. | British Library Conference Proceedings | 2004
    Keywords: Optical MEMS

    A Two-Mask Process for Self-Assembled Vertical Comb Drive Mirrors

    Isamoto, K. / Makino, T. / Kato, K. et al. | British Library Conference Proceedings | 2004
    Keywords: Optical MEMS

    Optically Assisted Electrostatic Actuation Mechanism

    Yamauchi, Y. / Higo, A. / Kakushima, K. et al. | British Library Conference Proceedings | 2004
    Keywords: Optical MEMS