1–2 of 2 hits
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    Towards a High Performance Optical MEMS Devices Using Double-Side Processes on SOI Wafer

    Wu, M. / Lin, H.-Y. / Liu, P.-T. et al. | British Library Conference Proceedings | 2004
    Keywords: Optical MEMS

    A Transmissive Interferometric Light Modulator based on a Silicon Nitride Double-Half-Wave Filter Structure

    Kato, T. / Solgaard, O. / IEEE et al. | British Library Conference Proceedings | 2004
    Keywords: Optical MEMS