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Microelectromechanical systems
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Design and Fabrication of Eye-Type Scanning Mirror with Dual Vertical Combs for Laser Display
Fabrication of Vertical Optical Plane Using DRIE and KOH Crystalline Etching of (110) Si Wafer
A Pulse-Operating Electrostatic Microactuator for Latch-up Driving
Nano-scale Bi-stable Electrostatic Actuator: Design and Fabrication
Attenuation-Controllable 2x2 Optical Add-Drop Module Using a Pair of Modified V-type Micromirrors