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    Rapid x-ray reflectivity (XRR) characterization and process monitoring of multilayer Ta/Al~2O~3/Ta/SiO~2/Si [4449-30]

    Leng, J. / Opsal, J. L. / SPIE | British Library Conference Proceedings | 2001
    Contributors: Duparre, A.

    Use of light scatter signals to identify particle material (Invited Paper) [4449-17]

    Stover, J. C. / Ivakhnenko, V. I. / Eremin, Y. A. et al. | British Library Conference Proceedings | 2001
    Contributors: Duparre, A.

    Recent developments in spectroscopic ellipsometry for in-situ applications (Invited Paper) [4449-07]

    Johs, B. D. / Hale, J. / Ianno, N. J. et al. | British Library Conference Proceedings | 2001
    Contributors: Duparre, A.

    Measurement of steep aspheres: a step forward to nanometer accuracy [4449-25]

    Weingartner, I. / Schulz, M. / Thomsen-Schmidt, P. et al. | British Library Conference Proceedings | 2001
    Contributors: Duparre, A.

    IR spectroscopic ellipsometry for industrial characterization of semiconductors [4449-09]

    Boher, P. / Bucchia, M. / Piel, J. P. et al. | British Library Conference Proceedings | 2001
    Contributors: Duparre, A.

    Present and future industrial metrology needs for qualification of high-quality optical microlithography materials (Invited Paper) [4449-01]

    Engel, A. / Morsen, E. / Jordanov, A. et al. | British Library Conference Proceedings | 2001
    Contributors: Duparre, A.

    X-ray study of surfaces and interfaces [4449-31]

    Asadchikov, V. E. / Bukreeva, I. N. / Duparre, A. et al. | British Library Conference Proceedings | 2001
    Contributors: Duparre, A.

    Versatile optical system for static and dynamic thermomagnetic recording using a scanning laser microscope [4449-26]

    Clegg, W. W. / Jenkins, D. F. / Helian, N. et al. | British Library Conference Proceedings | 2001
    Contributors: Duparre, A.

    Advantages of a new subnanometer aspheric profiling technique with respect to the unique requirements of EUV lithography mirrors [4449-24]

    Glenn, P. E. / SPIE | British Library Conference Proceedings | 2001
    Contributors: Duparre, A.

    Effects of particle shape on particle identification and scatter predictions [4449-18]

    Ivakhnenko, V. I. / Stover, J. C. / Scheer, C. A. et al. | British Library Conference Proceedings | 2001
    Contributors: Duparre, A.

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