VUV light-scattering measurements of substrates and thin film coatings [5188-14]
AFM tip calibration using nanometer-sized structures induced by ion beam sputtering [4449-28]
Diffractive solid immersion lenses: characterization and manufacturing [4449-29]
Polarized light scattering from metallic particles on silicon wafers [4449-39]
Measurement of the elastic constants of nanometric films [4449-16]
X-ray study of surfaces and interfaces [4449-31]