Large piezoelectric monolithic multilayer actuators are able to provide relatively large displacements and force demanded, for instance, by the automotive industry. Additional in dispensable conditions are high reliability and long lifetime at temperatures up to 150 deg C. At Siemens Corporate Research and Development fabricated devices meeting these requirements are represented by disclosing their properties along with the testing methods and facilities used for charcterization. Forces up to 5 kN and displacements as large as 10 micron are available with samples of size 10 x 10 x 18 mm3 using driving voltages well below 100 V. In a brief survey some important compositional, structural, and functional pecularities in comparison with other established multilayer devices like capacitors and substrates are outlined. The necessity of actual investigations concerning elecrode-ceramic interaction and relation of microstructure to failure mechanisms and life time is pointed out.
Large piezoelectric monotlithic multilayer actuators
Monolithische piezoelektrische Aktoren in Mehrschichttechnik
1994
4 Seiten, 4 Bilder, 2 Tabellen, 4 Quellen
Conference paper
English
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