MEMS components forming a complete hybrid cold gas microthruster system for spacecraft, designed to deliver maximurn thrusts in the range of 0.1 mN to 10 mN, have been demonstrated. The systern includes three different micromachined subsystems: a nozzle unit comprising four nozzies generating supersonic flows, four independent piezoelectric proportional valves with leak rates below 10-5 sccm He, and two particle filters. The perforrnances of all these MEMS subsystems liave been evaluated.
A hybrid cold gas microthruster system for spacecraft
Hybride Mikroantriebe mit kalten Druckgasen für die Raumfahrttechnik
2001
4 Seiten, 3 Bilder, 1 Tabelle, 9 Quellen
Conference paper
English
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