This paper presents a review of the varied technologies applied to a pressure sensor using the silicon capacitive absolute pressure (SCAP) technology for the sensing element. A brief description introduces the system 'components', i.e., sensing element, electronics and packaging that comprise the transducer. The criteria for a capacitive sensing element in an automotive environment as well as the technologies used to produce the element is discussed. A reliable, accurate and cost effective automotive sensor is not only dependent on the selection of the sensing element technology, but also the engineering tradeoffs made between all components. The theoretical and physical technologies used to explore and define these tradeoffs, such as computer modelling and laser drilling, are presented.
New automotive sensor solid state technologies part II
Neuer Automobil-Sensor in Halbleitertechnologie Teil II
1983
9 Seiten, 8 Bilder, 1 Tabelle, 9 Quellen
Conference paper
English
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