Resolution and Feature Size Assessment in Soft X-Ray Microscopy Images

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Resolution and Feature Size Assessment in Soft X-Ray Microscopy Images

Marconi, M. C. / Wachulak, P. W. / Brewer, C. / Brizuela, F. / Bartels, R. / Menoni, C. S. / Rocca, J. J. / Anderson, E. / Chao, W.

Abstract

Abstract Soft X-ray microscopy images of nanostructures where analyzed with a method developed to simultaneously determine the object feature size and image resolution. This method is based on the correlation between the image and a set of templates of known resolution obtained from the original image. The analysis was applied to images obtained with a Fresnel zone plate microscope that uses 13.2 nm wavelength laser light for illumination. The object feature size and the resolution obtained with this method are shown to be in very good agreement with independent measurements of both magnitudes.

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Document information

Title :

Resolution and Feature Size Assessment in Soft X-Ray Microscopy Images

Contributors:

Marconi, M. C. (author) / Wachulak, P. W. (author) / Brewer, C. (author) / Brizuela, F. (author) / Bartels, R. (author) / Menoni, C. S. (author) / Rocca, J. J. (author) / Anderson, E. (author) / Chao, W. (author)

Published in:

X-Ray Lasers 2008 ; 7 ; 483-488

Springer Proceedings in Physics ; 130 , 7

Publication date :

2009-01-01

Size :

6 pages

ISBN :

978-1-4020-9924-3 , 978-1-4020-9923-6

ISSN :

0930-8989

DOI :