Silicon Microchannel Plate(MCP)is a new image multiplier devices based semiconductor process technology. Compared with the traditional glass MCP, Silicon MCP has an advantage in technology that the dynode materials and the substrate materials are separate. At the same time, the dynode preparation process and the microchannel arrays are also separate. Two different dynode conductive layer films are prepared: polysilicon conductive films prepared by low pressure chemical vapor deposition (LPCVD) and AZO thin films coated by atomic layer deposition (ALD). The conductive films coated by ALD are superior to dynode conductive films prepared by LPCVD. By comparing the resistivity of conductive polysilicon thin film and AZO thin film of different Al concentrations doped, AZO thin film of different Al concentrations doped is a more suitable conductive layer dynode material to satisfy the MCP conductive layer resistivity requirements.
Research on resistance properties of conductive layer materials of microchannel plate film dynode
Selected Papers from Conferences of the Photoelectronic Technology Committee of the Chinese Society of Astronautics 2014, Part I ; 2014 ; China,China
Proc. SPIE ; 9521
2015-03-04
Conference paper
Electronic Resource
English
Multiple-Dynode-Layer Microchannel Plate
NTRS | 1990
|Microchannel Plate Detectors for Space Astronomy
British Library Online Contents | 1992
|Microchannel Plate Imaging Detectors for the Ultraviolet
British Library Online Contents | 1992
|Delay-Line Anode For Microchannel-Plate Spectrometer
NTRS | 1989
|Multi-layer thin-film insulation with grounding through conductive film
European Patent Office | 2023
|