Realization of integrated narrow bandpass filters in the infrared region

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Realization of integrated narrow bandpass filters in the infrared region

Shao-Wei Wang, / Dingquan Liu, / Bin Lin, / Xiaoshuang Chen, / Zhifeng Li, / Yan Shi, / Wei Wang, / Wei Lu,

We demonstrated a high-efficiency technique for the integration of narrow bandpass filters (NBPFs). A filter array integrated with 16 filters on a single substrate has been fabricated by twice depositing processes. The bandpass of the filters can be tuned widely and range from 2.295 to 2.967 /spl mu/m in this case. The relative full width at half maximum (FWHM) /spl delta//spl lambda///spl lambda/ of each filter is less than 0.7%. And the intensity of the bandpass is up to 41.3%.

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Title :

Realization of integrated narrow bandpass filters in the infrared region

Contributors:

Shao-Wei Wang, (author) / Dingquan Liu, (author) / Bin Lin, (author) / Xiaoshuang Chen, (author) / Zhifeng Li, (author) / Yan Shi, (author) / Wei Wang, (author) / Wei Lu, (author)

Published in:

Infrared and Millimeter Waves, Conference Digest of the 2004 Joint 29th International Conference on 2004 and 12th International Conference on Terahertz Electronics, 2004. ; 691-692

Publication date :

2004-01-01

Size :

137927 byte

ISBN :

0-7803-8490-3

DOI :

https://doi.org/10.1109/ICIMW.2004.1422279

Type of media :

Conference paper