METHOD FOR PRODUCING LAMINATE, AND LAMINATE
METHOD FOR PRODUCING LAMINATE, AND LAMINATE
- New search for: KIHARA NAOTO
- New search for: MIYAGI TAKAHIRA
- New search for: KIHARA NAOTO
- New search for: MIYAGI TAKAHIRA
PROBLEM TO BE SOLVED: To provide a method for producing a laminate, in which the laminate has a titanium oxide layer consisting mainly of rutile type titanium dioxide and the temperature when a film is deposited and the temperature when heat treatment is performed after the film is deposited can be made comparatively lower.SOLUTION: The method for producing the laminate comprises a film deposition step and a heat treatment step. At the film deposition step, a precursor layer is deposited on a transparent substrate at a temperature of 150°C or lower by a sputtering method by using a titanium target containing 1-5 atomic% of at least one additional element selected from among Ni, Fe, and Cu. At the heat treatment step, the precursor layer-deposited transparent substrate is heat-treated at a temperature of 550-750°C to obtain the titanium oxide layer consisting mainly of rutile type titanium dioxide.
【課題】ルチル型酸化チタンから主としてなる酸化チタン層を有する積層体の製造方法であって、成膜時の温度および成膜後の熱処理温度を比較的低温にできる積層体の製造方法を提供する。【解決手段】積層体の製造方法は、成膜工程と熱処理工程とを有する。成膜工程は、１５０℃以下の温度の透明基体上に、Ｎｉ、Ｆｅ、およびＣｕから選ばれる少なくとも１種の添加元素を１〜５原子％含むチタンターゲットを使用して、スパッタリング法により前駆体層を成膜する。熱処理工程は、前駆体層が形成された透明基体を５５０〜７５０℃の温度で熱処理して、ルチル型酸化チタンから主としてなる酸化チタン層を得る。【選択図】なし
Document information
METHOD FOR PRODUCING LAMINATE, AND LAMINATE
積層体の製造方法および積層体
2015-09-24
Patent
Electronic Resource
Japanese
| IPC: | C03C Chemische Zusammensetzungen für Gläser, Glasuren oder Emails , CHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREOUS ENAMELS / B32B LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM , Schichtkörper, d.h. aus Ebenen oder gewölbten Schichten, z.B. mit zell- oder wabenförmiger Form, aufgebaute Erzeugnisse / B60J WINDOWS, WINDSCREENS, NON-FIXED ROOFS, DOORS, OR SIMILAR DEVICES FOR VEHICLES , Fenster, Windschutzscheiben und bewegbare Dächer, Türen oder Ähnliches für Fahrzeuge / C01G Verbindungen der von den Unterklassen C01D oder C01F nicht umfassten Metalle , COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F / C23C Beschichten metallischer Werkstoffe , COATING METALLIC MATERIAL |
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