Fabrication of optical disk mastering using electron beam and embossing process

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Pan, C. T. / Lo, S. C. / Yang, J. C. / Chen, Y. J.

Title :

Contributors:

Pan, C. T. (author) / Lo, S. C. (author) / Yang, J. C. (author) / Chen, Y. J. (author)

Published in:

OPTICAL AND QUANTUM ELECTRONICS ; 39 , 8 ; 693-705

Publication date :

2007-01-01

Size :

13 pages

ISSN :

0306-8919

Type of media :

Article (Journal)

Type of material :

Language :

English

Classification :

DDC:

537.5

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