Title :

Femtosecond laser microfabrication of subwavelength structures in photonics [6459-10]

Contributors:

Mezentsev, V. (author) / Petrovic, J. S. (author) / Dubov, M. (author) / Bennion, I. (author) / Dreher, J. (author) / Schmitz, H. (author) / Grauer, R. (author) / Pfleging, Wilhelm / Society of Photo-optical Instrumentation Engineers

Conference:

Laser-based micro- and nanopackaging and assembly ; 2007 ; San Jose, CA

Laser-based micro- and nanopackaging and assembly ; 64590B

PROCEEDINGS- SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING ISSN 0277-786X

Publication date :

2007-01-01

Size :

64590B

Remarks:

Includes bibliographical references and author index.

ISBN :

0819465720

ISSN :

0277-786X

Type of media :

Conference paper

Type of material :

Print

Language :

English

Keywords :

Lasers , Electronic packaging , Micromachining , Micromechanics , Nanopackaging

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